Deposition of ZrON thin films by reactive magnetron sputtering using a hollow cylindrical target: Journal of Vacuum Science & Technology A: Vol 36, No 6
Cylindrical and Rotating Magnetron Sputtering – Vacuum Technology & Coating Blog
Cavity Magnetron Working | Frequency Pulling and Pushing in Magnetron
Tutorial: Hysteresis during the reactive magnetron sputtering process: Journal of Applied Physics: Vol 124, No 24
YBCO based multilayers for optoelectronic devices
Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system - ScienceDirect
DoITPoMS - TLP Library Physical Vapour Deposition of Thin Films - Sputtering